Mai i te tirohanga ngaio, he tino uaua te hanga o te maramara me te hoha.Heoi, mai i te mekameka ahumahi oti o IC, kua wehea te nuinga ki nga wahanga e wha: hoahoa IC → hangahanga IC → kete → whakamatautau.
Te tukanga whakaputa maramara:
1. Hoahoa maramara
He hua iti te maramara engari he tino tika.Ki te hanga maramara, ko te hoahoa te waahanga tuatahi.Ko te hoahoa e hiahia ana ki te awhina o te hoahoa maramara o te hoahoa maramara e hiahiatia ana mo te tukatuka me te awhina o te taputapu EDA me etahi waahanga IP.
Te tukanga whakaputa maramara:
1. Hoahoa maramara
He hua iti te maramara engari he tino tika.Ki te hanga maramara, ko te hoahoa te waahanga tuatahi.Ko te hoahoa e hiahia ana ki te awhina o te hoahoa maramara o te hoahoa maramara e hiahiatia ana mo te tukatuka me te awhina o te taputapu EDA me etahi waahanga IP.
3. Silicon - hiki
I muri i te wehenga o te silicon, ka whakarerea nga mea e toe ana.Ko te silicon parakore i muri i nga waahanga maha kua eke ki te kounga o te hangahanga semiconductor.Koinei te mea e kiia nei ko te hiko hiko.
4. Silicon -maka ingots
I muri i te purenga, me maka te kirikiri ki roto i nga ingots silicon.Ko te karaihe kotahi o te hiko hiko -grade silicon i muri i te maka ki roto i te ingot e pa ana ki te 100 kg, a ka tae te ma o te silicon ki te 99.9999%.
5. Tukatuka kōnae
I muri i te makanga o te ingot silicon, me tapatapahia te katoa o te ingot silicon, koinei te angiangi e kiia nei ko te wafer, he tino kikokore.Whai muri, ka whakakoi te angiangi kia tino tika, ka maeneene te mata ano he whakaata.
Ko te diameter o nga angiangi silicon he 8-inihi (200mm) me te 12-inihi (300mm) te whanui.Ko te nui o te diameter, ka iti ake te utu o te maramara kotahi, engari ko te teitei ake te uaua o te tukatuka.
5. Tukatuka kōnae
I muri i te makanga o te ingot silicon, me tapatapahia te katoa o te ingot silicon, koinei te angiangi e kiia nei ko te wafer, he tino kikokore.Whai muri, ka whakakoi te angiangi kia tino tika, ka maeneene te mata ano he whakaata.
Ko te diameter o nga angiangi silicon he 8-inihi (200mm) me te 12-inihi (300mm) te whanui.Ko te nui o te diameter, ka iti ake te utu o te maramara kotahi, engari ko te teitei ake te uaua o te tukatuka.
7. Eclipse me te wero katote
Tuatahi, he mea tika ki te whakakore i te waikura silicon me te nitride silicon kua kitea i waho o te photoresist, me te whakaheke i te paparanga o te silicon hei whakamahana i waenganui i te ngongo karaihe, ka whakamahi i te hangarau tarai hei whakaatu i te hiako o raro.Na ka werohia te boron, te ūkuikui ranei ki roto i te hanganga silicon, ka whakakiia te parahi ki te hono atu ki etahi atu transistors, katahi ka tono i tetahi paparanga kapia ki runga hei hanga paparanga.Ko te tikanga, he maha nga paparanga kei roto i te maramara, penei i nga huarahi nui kua tuituia.
7. Eclipse me te wero katote
Tuatahi, he mea tika ki te whakakore i te waikura silicon me te nitride silicon kua kitea i waho o te photoresist, me te whakaheke i te paparanga o te silicon hei whakamahana i waenganui i te ngongo karaihe, ka whakamahi i te hangarau tarai hei whakaatu i te hiako o raro.Na ka werohia te boron, te ūkuikui ranei ki roto i te hanganga silicon, ka whakakiia te parahi ki te hono atu ki etahi atu transistors, katahi ka tono i tetahi paparanga kapia ki runga hei hanga paparanga.Ko te tikanga, he maha nga paparanga kei roto i te maramara, penei i nga huarahi nui kua tuituia.
Wā tuku: Hūrae-08-2023